MicroTech Systems, Inc. Engineering Wet Process Solutions

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Chemical Dispense

Ultrapure CDS2001 Series - Acid or Solvent

Optimized for manufacturing photovoltaic solar wafers.

Ultrapure CDS2001 Series - Acid

MicroTech’s chemical distribution delivery system and mix-blend chemical delivery systems are targeted at the most demanding processing requirements used to manufacture microelectronic devices. The CDS 2001 Series bulk chemical delivery systems are used for acids and bases. The chemical delivery modules are designed to distribute chemicals throughout the Fab with continuous filtered recirculation.


The CDS-SS 2001-SS Series bulk chemical delivery systems

The CDS-SS 2001-SS Series bulk chemical delivery systems are used for solvents. The chemical delivery modules are designed to distribute chemicals through out the Fab with continuous filtered recirculation.


  • Dual drum systems available
  • Main distribution unit requests chemicals via operator command
  • Includes on-demand blending
  • Precise metering of solutions and tracking included

  • chemical dispense equipment - MT System Inc

Chemical Dispense System Details

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