Drying

Drying is a critical process step for defect-free substrates. Surface tension gradient drying, also called Marangoni drying, yields substrates that are watermark-free with low particle counts and no feature damage. Since there are no metallic components inside the dryer chamber, charge damage is virtually eliminated.

MicroTech (MT Systems) can integrate surface tension gradient dryer into wet process benches or produce the dryer as a stand alone unit.

Read our Surface Tension Gradient Dryer product application note.