MicroTech Systems, Inc. Engineering Wet Process Solutions

Call us Toll Free 877.298.9562

Intelligent Process Solutions for Chemical Distribution Systems



MicroTech, a leader in wet processing equipment for microelectronics, has a wide variety of chemical distribution systems and chemical dispense carts, including chemical waste collection.


Advantages

  • Broadest line of fully automatic, modular, application specific chemical management products

  • Pressure and pump chemical delivery technology are both available

  • Select from on-demand or continuous flow operation systems

  • Stabilized filtration is offered for optimum particle reduction

  • Simple expansion and system reconfiguration is possible using PLC Graphic User Interface (GUI)

  • All products certified by an independent lab

Chemical Distribution - Product Features

  • Modular design for cost control and maximum flexibility

  • Wide selection of recirculation options

  • Automatic component flush and depressurization for servicing

  • Stabilized filtration for ultra-high purity chemical handling

  • Wide range of filter matrix options

  • Automatic filter bleed

  • Leak detection

  • Aspirated drain

  • All welded construction

  • Component and channel redundancy

  • On-board electronic scale control

Cleanroom Manufactured

  • Systems are manufactured in a clean environment

  • Facilities for final test include 18 megohm DI water and high purity N2

Products Available

  • Chemical Delivery Systems:

    • MT – 500

    • MT – 1000

    • MT – 2000

    • MT – 4000

  • Bulk Chemical Mix System: MT Series 2200

  • Drum Cabinet System: MT – DCS 100

  • Waste Collection System: MT – WCS 100

Standard System Safety Features

  • Segregated electrical and chemical compartments

  • Cabinet leak detection

  • Cabinet door interlocks

  • Local and remote EMO

  • Cabinet DIW spray gun

  • Pressure and flow indicator on pump outlet

  • High-flow switch for system shut down

  • Stainless steel cabinets and components for Solvent Systems

    • Intrinsically safe electronics

    • Wetted surfaces are 316L

    • High pressure VCR fittings

    • Meets class 1 Division 2 codes

    • Fire suppression system installed in all cabinets

Reliability Guarantees

  • MTBF > 4500 hours

  • MTBA > 2500 hours

  • MTTR < 2 hours

  • Availability > 99%   

877.298.9562

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