MicroTech Systems, Inc. Engineering Wet Process Solutions

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About Mt systems Inc

An acknowledged leader in the engineering, manufacturing and support of wet process and chemical distribution equipment as well as on-site service, repair and maintenance.

 

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MT Systems Inc.
49040 Milmont Drive
Fremont, CA 94538

Tel: (510) 651-5277
Fax: (510) 651-3374

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MicroTech Office Location - Fremont, CA

News & Press Releases

MicroTech Delivers Horizontal Tube Washer to Semiconductor Supplier

Quartz tube wash system designed to reduce chemical and water usage and effluent costs

FREMONT, CA, May 29, 2014 –Silicon Valley wet process equipment manufacturer MicroTech has delivered its quartz tube washer to a leading edge company that provides precision cleaning to the semiconductor industry. The model MTS-QTW-2000 is an eight-foot horizontal tube washer that can accommodate quartz and SiC (silicon carbide) tubes and also clean liners, wafer boats, and small parts.

The system is designed to reduce costs, primarily through reducing chemical and water usage and minimalizing effluent waste. Precision etch control is accomplished with on-board metrology.

In addition, the system incorporates:

  • Separate HF and nitric acid tanks for blending
  • Pre-mix reservoir, including DI water mix
  • Recirculated blend of acids for extended life
  • Graphic User Interface (GUI) that is recipe based with user-friendly software.

About MicroTech

MicroTech is a leader in the engineering, manufacturing and applications support of wet process and chemical distribution equipment as well as on-site service, repair and maintenance. The company’s 20,000 square foot Silicon Valley manufacturing facility is equipped with a Class 100 clean room fully facilitated with DI water and nitrogen for pre-shipment final testing. With over 25 years' experience as a semiconductor equipment manufacturer, MicroTech also supplies the Solar, MEMS, LED, BioMed and flat panel display (FPD) markets, among others. www.microtechprocess.com

 

Company Contact: Craig Story, V.P. Sales and Marketing, 510.651.5277 ext. 213

Agency Contact: Bruce Kirkpatrick, 925.244.9100, bruce@kirk-com.com

877.298.9562

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