Industries Served MicroTech products are designed to serve the requirements of a variety of high technology industries. Solar Semiconductor MEMS Flat Panel Display Disk LED Biomedical Wafer Reclaim

Leading Applications Surface Preparation and Cleaning Advanced and state-of-the-art surface preparation and plating technology. Wafer cleaning Treating Etching Stripping Plating Parts cleaning Proprietary technology targeting leading-edge technology road map issues. Wafer cleaning and stripping. Dual damascene processes. Shallow trench Isolation (STI) Pre-gate cleans and surface preparation. Chemical Distribution Chemical distribution system technology CMP slurries and slurry mixtures. Chemical mixtures used to strip etch residues. Processing that is sensitive to surges in mass flow. Contamination-sensitive chemistries.

Products

MicroTech builds custom designs and configurations to meet each customer’s unique requirements.

• Fully automated, semi-automated and manual wet process equipment
• Substrate and processing chemistry monitoring and control
• Turnkey systems from bulk chemical, distribution delivery and management to the substrate
• Substrate handlers, sub-systems and components

Wet Processing Systems

MicroTech designs and manufactures automated wet benches, semi-automated wet benches and manual wet stations for semiconductor, biomedical, data storage and other high technology applications worldwide. MicroTech's intelligent engineering and cost effective manufacturing capabilities results in smart alternatives and robust manufacturing solutions.

• Automated Processing Systems
• Semi-automated Processing Systems
• Manual Processing Systems

Chemical Distribution Systems

MicroTech offers a patented gravity-feed chemical distribution technology known as Galileo^tm. The system requires no pumps or vacuum; no moving parts or methods that can change the properties of the chemicals being distributed and mixed. Even shock-sensitive CMP slurries are effectively distributed using the field-tested Galileo Technology. Our patented, mix-blend technology blends dilute solutions of HF accurately and consistently.

Product Literature

Brochures and datasheets are presented in Adobe PDF format. Orca – automated wet process station Stingray – semi automated wet process station Otter – manual wet process station

• MTS Orca automated wet process station  (PDF, 1,134k)
• MTS Stingray semi automated wet process station  (PDF, 1,329k)
• MTS Otter manual wet process station  (PDF, 1,198k)
• Galileo System  (PDF, 185k)