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Industries Served
MicroTech products are designed to serve the requirements of a variety of high technology industries.
- Semiconductor
- MEMS
- Flat Panel Display
- Disk
- LED
- Solar
- Biomedical
- Wafer Reclaim
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Leading Applications
Surface Preparation and Cleaning
Advanced and state-of-the-art surface preparation and plating technology.
- Cleaning
- Treating
- Etching
- Stripping
- Plating
- Parts cleaning
Proprietary technology targeting leading-edge technology road map issues.
- Wafer cleaning and stripping.
- Dual damascene processes.
- Shallow trench Isolation (STI)
- Pre-gate cleans and surface preparation.
Chemical Distribution
- Chemical distribution system technology
- CMP slurries and slurry mixtures.
- Chemical mixtures used to strip etch residues.
- Processing that is sensitive to surges in mass flow.
- Contamination-sensitive chemistries.
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Products
MicroTech builds custom designs and configurations to meet each customer’s unique requirements.
- Fully automated, semi-automated and manual
- Substrate and processing chemistry monitoring and control
- Turnkey systems from bulk chemical, distribution delivery and management to the substrate
- Substrate handlers, sub-systems and components
Wet Processing Systems
MicroTech designs and manufactures automated, semi-automated and manual wet stations for semiconductor, biomedical, data storage and other high technology
applications worldwide. MicroTech's intelligent engineering and cost effective manufacturing capabilities results in smart alternatives and robust
manufacturing solutions.
Chemical Distribution Systems
MicroTech offers a patented gravity-feed chemical distribution technology known as Galileotm. The system requires no pumps
or vacuum; no moving parts or methods that can change the properties of the chemicals being distributed and mixed. Even shock-sensitive CMP slurries are effectively distributed using the field-tested Galileo Technology. Our patented, mix-blend technology blends dilute solutions of HF accurately and consistently.
Product Literature
Brochures and datasheets are presented in Adobe PDF format.
Orca – automated wet process station
Stingray – semi automated wet process station
Otter – manual wet process station
