MicroTech Systems, Inc.
MicroTech Systems, Inc.
 





Product Snapshots
Downloadable Product Literature
Applications and Products

Industries Served
MicroTech products are designed to serve the requirements of a variety of high technology industries.
  • Semiconductor
  • MEMS
  • Flat Panel Display
  • Disk
  • LED
  • Solar
  • Biomedical
  • Wafer Reclaim

 

Leading Applications

Surface Preparation and Cleaning
Advanced and state-of-the-art surface preparation and plating technology.

  • Cleaning
  • Treating
  • Etching
  • Stripping
  • Plating
  • Parts cleaning

Proprietary technology targeting leading-edge technology road map issues.
  • Wafer cleaning and stripping.
  • Dual damascene processes.
  • Shallow trench Isolation (STI)
  • Pre-gate cleans and surface preparation.

Chemical Distribution

  • Chemical distribution system technology
  • CMP slurries and slurry mixtures.
  • Chemical mixtures used to strip etch residues.
  • Processing that is sensitive to surges in mass flow.
  • Contamination-sensitive chemistries.

Products

MicroTech builds custom designs and configurations to meet each customer’s unique requirements.

  • Fully automated, semi-automated and manual
  • Substrate and processing chemistry monitoring and control
  • Turnkey systems from bulk chemical, distribution delivery and management to the substrate
  • Substrate handlers, sub-systems and components

Wet Processing Systems

MicroTech designs and manufactures automated, semi-automated and manual wet stations for semiconductor, biomedical, data storage and other high technology applications worldwide. MicroTech's intelligent engineering and cost effective manufacturing capabilities results in smart alternatives and robust manufacturing solutions.

Chemical Distribution Systems

MicroTech offers a patented gravity-feed chemical distribution technology known as Galileotm. The system requires no pumps or vacuum; no moving parts or methods that can change the properties of the chemicals being distributed and mixed. Even shock-sensitive CMP slurries are effectively distributed using the field-tested Galileo Technology. Our patented, mix-blend technology blends dilute solutions of HF accurately and consistently.

Product Literature
Brochures and datasheets are presented in Adobe PDF format. Orca – automated wet process station Stingray – semi automated wet process station Otter – manual wet process station
 
www.microtechprocess.com