Chiller

MicroTech Systems has developed the MTS TCR 2000 Recirculator for precise and stable process bath temperature control under a broad range of process conditions.

The Recirculator, when used in conjunction with the MicroTech MTS-65 microprocessor based temperature controller, is easily integrated into process stations with filtered etch, positive resist developers, or as a replacement to any immersion heating process.

Standard Features

• Heating and cooling capacity
• Temperature range 10° to 60°C +/- 0.5°C
• 1500 BTU condensing unit
• 1500 watt heating capability
• Stainless steel outer cabinet

Safety Features

• Low liquid level switch
• Thermal reset switch
• Pressure relief valve

Positive Displacement Pump

• Magnetic drive
• 300 GPH pumping capacity
• Discharge head of 10 feet

Closed Loop System

• One gallon capacity – Glycol coolant

Footprint

• 25" long x 18.5" wide x 12" tall

Power Requirements

• 120 volts; 30 amps; 60 Hz