Pump System

MicroTech’s chemical distribution and mix-blend systems are targeted at the most demanding processing requirements used to manufacture microelectronic devices. The CDS 2001 Series bulk chemical delivery systems are used for acids and bases. The chemical delivery modules are designed to distribute chemicals throughout the Fab with continuous filtered recirculation.

The CDS-SS 2001-SS Series bulk chemical delivery systems are used for solvents. The chemical delivery modules are designed to distribute chemicals through out the Fab with continuous filtered recirculation.