Semi-automated Acid Station
MicroTech's Semi-Automated systems give a combination of performance, flexibility, and features found nowhere else. MicroTech Semi-automated Stations are used for cleaning, stripping and drying.
Linear or rotational automation provide a flexible footprint, ergonomic design and safe workplace envelope.
Our guaranteed uptime and capability to interface with variety of peripheral equipment leads to higher yields and improved throughput.
Semi-automated Solvent Station
Our Semi-Automated Solvent Station are used for cleaning, stripping cleaning and drying. Our guaranteed uptime and capability to interface with variety of peripheral equipment in higher yields and improved throughput. Linear or rotational automation provides a flexible footprint, ergonomic design and safe work place envelope. Micro Tech's Semi-automated systems give a combination of performance, flexibility, and features found nowhere else.
Semi-automated Systems Features and Benefits
- modular design for flexibility, modification, maintenance
- rear maintenance access
- flush mount capable
- programmable agitation
- product drop off and pick up capable
- PLC control with color GUI interface
- control interface to integrated components
- modular electronics with quick disconnects
- S2-93, CE and Factory Mutual certified
- up to Class 1 mini environment
- cleanroom tested and packaged in a class 1000 or better cleanroom
using high purity services
Options
- 304 stainless steel construction (solvent station)
- 4910 CPVC shell construction (acid station)
- bulk chemical fill interface
- chemical blending and spiking
- fire suppression system
- DI water reclaim
- front or rear mounted automation
Parts Cleaning
Our Parts Cleaning System provide true modularity, flexibility for future upgrades ,and designed to meet Semiconductor Industry safety standards.
Tube Wash
Systems Options
- Bath recirculation/filtration
- High and room temperature process.
- Megasonic and ultrasonic baths
- Particle and thick residue removal.
- Choice of tank materials and piping.
- Tailored to unique processing chemistries.
- Bath spiking
- Hydrogen peroxide D.I. water and other additives that need to be replenished.
- Bulk distribution
- To the station and dispense to the baths.
- In-situ monitoring
Particles, dissolved silica, resistivity, etc.
