MicroTech Systems, Inc. - state of the art microelectronic wet processing technology & equipment






Wet Process Equipment Semi-Automated Software

MicroTech complete wet-process equipment semi-automated software is designed for seamless integration in today’s multi-processor networked environment. Features include:

  • Ethernet Based Distributed Control System. The Chemical distribution and the bench control systems are networked together with a common Graphical User Interface (GUI).
  • GUI Win32 Graphical User Interface based on MS-Windows 2000.
  • High Resolution TFT Flat Panel Touch Screen. Active matrix color LCD - 12" viewable XGA 1024 x 768 resolution 250 nit brightness
  • Event and Recipe Driven Process Controls.
  • Multi-Level Security Access Control for Tool Manager, Engineer, Maintenance, Operator.
  • Host SECS-GEM interface
  • Barcode and or RFID (Radio Frequency Identification) interface (Option)
  • Data Logging and History Log (real-time):
  • Time Stamped Event/Alarm Logs Including Tool, Host, and Operator interactions.
  • All or specific Parameters can be logged in user definable intervals.
  • Real-time Graph and logging of tank data (i.e. Temperature, Flow, Level,)

Request additional information how we can create customized system software to meet your needs >

 
System software screen shots