Semi-automated Processing Systems  

-Stingray Series

Semi-automated Acid Station

MicroTech's Semi-automated process systems give a combination of performance, flexibility, and features found nowhere else. MicroTech Semi-automated stations are used for cleaning, stripping and drying.

Linear or rotational automation provide a flexible footprint, ergonomic design and safe workplace envelope.

Our guaranteed uptime and capability to interface with variety of peripheral equipment leads to higher yields and improved throughput.

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Semi-automated Solvent Station

Our Semi-automated Solvent Stations are used for cleaning, stripping and drying. Our guaranteed uptime and capability to interface with a variety of peripheral equipment lead to higher yields and improved throughput. Linear or rotational automation provides a flexible footprint, ergonomic design and safe work place envelope. MicroTech's Semi-automated systems give a combination of performance, flexibility, and features found nowhere else.

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Semi-automated Systems Features and Benefits

• FM4910 construction
• Modular design for flexibility, modification, maintenance
• Rear maintenance access
• Flush mount capable
• Programmable agitation
• Product drop off and pick up capable
• PLC control with color GUI interface
• Control interface to integrated components
• Modular electronics with quick disconnects
• Designed to the latest NFPA, NEC, CE and SEMI standards.
• Up to Class 1 mini environment
• Cleanroom tested and packaged in a class 1000 or better cleanroom using high purity services
• Fire suppression system (FM4910 complaint)
• Aerodynamically designed exhaust for optimal fume capture and operator safety.
  

Options

• 304 stainless steel construction (solvent station)
• Bulk chemical fill interface
• Chemical blending and spiking
• DI water reclaim
• Front or rear mounted automation
• PC control with color GUI interface

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System Options

• Bath recirculation/filtration
  • High and room temperature process.
• Megasonic and ultrasonic baths
  • Particle and thick residue removal.
• Choice of tank materials and piping.
  • Tailored to unique processing chemistries.
• Bath spiking
  • Hydrogen peroxide D.I. water and other additives that need to be replenished.
• Bulk distribution
  • To the station and dispense to the baths.
  • In-situ monitoring Particles, dissolved silica, resistivity, etc.

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Please also review the information for MicroTech Automated Wet Process System (Wet Bench) and Manual Wet Bench Station.