Advanced Drying Technology
Surface Tension Gradient Dryer
Wet Bench/ Wet Process Systems
Vortex 2000 Fully Automated
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Intelligent Process Station
Chemical Delivery Systems
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PSG Glass Removal
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Proprietary Mix Blend Systems
VORTEX 2000 FULLY AUTOMATED INTELLIGENT PROCESS SYSTEM™
The MicroTech Vortex 2000 IPS™ moves wafer cassettes in any number of preprogrammed destinations incorporating both linear and rotational robotics.
The system robotics can operate side to side in a linear fashion, including front to back, or back to front in a rotational fashion. This provides for a system footprint that is half the length in size of a linear robotics tool.
Download Vortex 2000 Product Note
- SMALL FOOTPRINT
- HIGH PERFORMANCE PRODUCTION
- HIGH PERFORMANCE PROCESS CONTROL
- MULTI-TASKING
- LINEAR + ROTATIONAL ROBOTICS
- HIGHEST RELIABILITY
- FLEXIBILITY IN DESIGN
- CUSTOM CONFIGURATIONS
- FRIENDLY GRAPHIC USER INTERFACE™ (GUI™)
Product Specifications:
Platform
- Wafer sizes up to 300 mm
- Flush mount or ballroom design options
- Chemical compatible components
- Compliant with SEMI s!tandards; S2-93
- CE certifications NFPA 79! !Factory Mutual-4910 Compliant
- Configurable to customer’s specific process requirements! !Fully automated robotics Chemical distributions system ready
Modules
- Custom process tanks for each chemical
- Temperature controlled process
- Megasonics or ultrasonics
- Recirculation & filtration of p!rocess chemistry
- Quick Dump Rinse (QDR)
- Surface tension gradient dryer option
Software
- GUI-based PC Microsoft XP
- Touch screen
- Recipe controlled
- SECS-GEM compliant
