MicroTech Systems, Inc. Engineering Wet Process Solutions

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VORTEX 2000 FULLY AUTOMATED INTELLIGENT PROCESS SYSTEM™

The MicroTech Vortex 2000 IPS™ moves wafer cassettes in any number of preprogrammed destinations incorporating both linear and rotational robotics.

The system robotics can operate side to side in a linear fashion, including front to back, or back to front in a rotational fashion. This provides for a system footprint that is half the length in size of a linear robotics tool.

The Vortex 2000 IPS™ is in a class of its own!

Download Vortex 2000 Product Note

The Vortex 2000 IPS™ - Product Specifications
  • SMALL FOOTPRINT
  • HIGH PERFORMANCE PRODUCTION
  • HIGH PERFORMANCE PROCESS CONTROL
  • MULTI-TASKING
  • LINEAR + ROTATIONAL ROBOTICS
  • HIGHEST RELIABILITY
  • FLEXIBILITY IN DESIGN
  • CUSTOM CONFIGURATIONS
  • FRIENDLY GRAPHIC USER INTERFACE™ (GUI™)

Product Specifications:

Platform

  • Wafer sizes up to 300 mm
  • Flush mount or ballroom design options
  • Chemical compatible components
  • Compliant with SEMI s!tandards; S2-93
  • CE certifications NFPA 79! !Factory Mutual-4910 Compliant
  • Configurable to customer’s specific process requirements! !Fully automated robotics Chemical distributions system ready

Modules
  • Custom process tanks for each chemical
  • Temperature controlled process
  • Megasonics or ultrasonics
  • Recirculation & filtration of p!rocess chemistry
  • Quick Dump Rinse (QDR)
  • Surface tension gradient dryer option

Software
  • GUI-based PC Microsoft XP
  • Touch screen
  • Recipe controlled
  • SECS-GEM compliant
Vortex 2000 Layout - MicroTech

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