MicroTech Systems, Inc. Engineering Wet Process Solutions

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An acknowledged leader in the engineering, manufacturing and support of wet process and chemical distribution equipment as well as on-site service, repair and maintenance.



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Tel: (510) 651-5277
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MicroTech Office Location - Fremont, CA

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MicroTech Receives Order for Mask Cleaning System from Touch Sensor Facility

Custom designed system automates cleaning process for extra large mask plates

FREMONT, CA, August 7, 2013 – A manufacturer of touch sensors has ordered a custom designed process system to clean large mask plates from MicroTech. The ORCA Intelligent Process System (IPS™) was specially designed to handle the extra weight of the plates, and the process tanks were custom designed for the larger size. The system will process mask plates larger than 450mm silicon wafers, the largest size previously available from MicroTech.

The fully automated wet bench system incorporates custom sized quartz tanks for cleaning, the MT Surface Tension Gradient Dryer (STGD) for the dry-in, dry-out configuration, and a robust designed robotics to handle the weight of the mask plates. A special cassette was designed to transfer the large plates between process tanks.

The ORCA Intelligent Process System (IPS™) also includes:

  • Temperature controlled recirculation and precise chemical spiking
  • Controlled Environment
  • MicroTech 5500 multi-tasking, GUI-based, touch screen, recipe controlled software
  • The MT 6000 Robotics System
  • Modular design for flexibility and ease of modification

The mask cleaning system will be delivered in September. Installation and final start-up qualification will follow.

About MicroTech

MicroTech is a leader in the engineering, manufacturing and applications support of wet process and chemical distribution equipment as well as on-site service, repair and maintenance. The company’s 20,000 square foot Silicon Valley manufacturing facility is equipped with a Class 100 clean room fully facilitated with DI water and nitrogen for pre-shipment final testing. With over 25 years’ experience as a semiconductor equipment manufacturer, MicroTech also supplies the Solar, MEMS, LED, BioMed and flat panel display (FPD) markets. www.microtechprocess.com

Company Contact: Craig Story, V.P. Sales and Marketing, 510.651.5277 ext. 213
Agency Contact: Bruce Kirkpatrick, 925.244.9100, bruce@kirk-com.com


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