MicroTech Systems, Inc. Engineering Wet Process Solutions

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An acknowledged leader in the engineering, manufacturing and support of wet process and chemical distribution equipment as well as on-site service, repair and maintenance.



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Tel: (510) 651-5277
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MicroTech Office Location - Fremont, CA

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MicroTech Delivers Automated Wafer Process System to Semiconductor Manufacturer in Texas

Custom designed, high throughput lift off system demonstrates increased ROI

FREMONT, CA, April 24, 2013 – A major Texas semiconductor manufacturer has purchased from MicroTech an ORCA Fully Automated Intelligent Process System (IPS) because of its ability to process wafers in a high throughput environment.

The wafer process system was specifically designed for a high throughput metal “lift off” application. Because of the custom designed process configuration, initial throughput data indicates a six fold increase in wafer throughput and increased ROI.

The 200mm fully automated ORCA IPS includes:

  • MicroTech 5500 multi-tasking, GUI-based, touch screen, recipe controlled software
  • MicroTech 5000 two axis linear transfer robot
  • Ultrasonic process for continuous, high energy cleaning
  • Temperature controlled recirculation of chemicals for reduced chemical usage
  • Modular design for flexibility and ease of modification
  • Bulk chemical supply interface

The automated wafer process system was delivered and installed and is currently going through final start-up qualification.

About MicroTech

MicroTech is a leader in the engineering, manufacturing and applications support of wet process and chemical distribution equipment as well as on-site service, repair and maintenance. The company’s 20,000 square foot Silicon Valley manufacturing facility is equipped with a Class 100 clean room fully facilitated with DI water and nitrogen for pre-shipment final testing. With over 25 years’ experience as a semiconductor equipment manufacturer, MicroTech also supplies the Solar, MEMS, LED, BioMed and flat panel display (FPD) markets. www.microtechprocess.com


Company Contact: Craig Story, V.P. Sales and Marketing, 510.651.5277 ext. 213
Agency Contact: Bruce Kirkpatrick, 925.244.9100, bruce@kirk-com.com


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