MicroTech Systems, Inc. Engineering Wet Process Solutions

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MicroTech (MT Systems) has developed a high temperature system for sapphire removal in LED processing. This process helps produce high brightness LEDs at a lower cost than existing methods. MTS has delivered a number of wet process stations with specialized solutions to major LED manufacturers.

HTSE-1000 Sapphire Etch System

MicroTech’s HTSE-1000 system has been specifically designed to meet the latest requirements for sapphire LED etching.  New applications for LED lighting are pushing the brightness, lifetime and stability requirements.  Quantum efficiency improvements are driving new vertical structures requiring additional etching requirements.  MicroTech’s new HTSE-1000 system has been specifically designed to support the uniquely high temperature requirements for etching these structures and achieving a 10x throughput improvement over conventional methodologies.

Historically, there has been a 190°C limitation for standard process baths.  Sapphire etching rates increase geometrically with temperature, so MicroTech (MT Systems) has developed a system that will achieve a 300-degree process temperature.

Designed to Take the Heat

The liquid in the specialized tank comes in contact with nothing but high purity quartz. No Teflon connections, sensors, or any other parts are used in the process area. Even the built-in condensing coils and automated lid are quartz.

For reliability, a special seal was developed to prevent a failure of the critical seal material that isolates the heater components from the environment.

Even the housing is special, utilizing Halar for its superior temperature and chemical compatibility, as well as special construction techniques to isolate the heat inside.

Auxiliary Modules Make it Complete

No drain valve works at these temperatures so a quartz aspirator was designed and built in our quartz fabrication facility to remove the chemistry without having to wait for it to cool.

The aspirator drains the tank to a cool-down module below the tank. This module has quartz cooling coils to assist in lowering the chemistry temperature quickly.

Also available is the quartz secondary containment module that can hold the entire contents of the tank in case of a tank breach.

The modules working together, creating a system that addresses all of the challenges of extreme temperature chemistries, allows you the freedom to experiment with processes previously not possible.

Automation and safety

Operating at these elevated temperatures requires extreme care in the design and manufacture of these systems.  MicroTech (MT Systems) has incorporated a number of safety considerations in its proprietary system design as well as full automation control to minimize operator interface to the process.

The HTSE-1000 represents the next step in LED equipment design, device cost reduction, and practical LED efficiency improvement.

LEDs on Patterned Sapphire Substrates

In the ongoing quest to make LEDs more efficient, LED chip manufacturers have developed patterned sapphire substrates (PSS). In fact, most high-brightness LEDs are made using PSS.
PSS helps extract more light from LEDs. A lot of light bounces back into the LED when using a polished sapphire substrate. Researchers discovered that patterning the surface of the substrate by etching nano-scale patterns helps more light, in the form of photons, escape, improving the light generated or extracted by the LED. It is reported that patterning can improve the extraction of light by as much as 30%. Read More>>

LED Market Trend

Following declines of 45% in 2011 and 30% in 2013, LED wafer fab equipment spending will rise 17% to nearly $1.2bn in 2014 as the LED industry is working through its over-capacity problems and will renew capital spending and capacity increases in 2014
Read More About LED Market Trend >>


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