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MEMS Technology from MT System Inc., CA


MEMS technology can be implemented using a number of different materials and manufacturing techniques, depending on target device and market sectors. It’s a simple, yet precise manufacturing tool. MicroTech (MT Systems) has been designing equipment for the MEMS industry since early 2000.

MEMS Technology and Commercial Market Opportunities

The real potential of MEMS starts to become fulfilled when these miniaturized sensors, actuators, and structures can all be merged onto a common silicon substrate along with integrated circuits (i.e., microelectronics). While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible “micromachining” processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. It is even more interesting if MEMS can be merged not only with microelectronics, but also with other technologies such as photonics, nanotechnology, etc. This is sometimes called “heterogeneous integration.” These technologies are filled with numerous commercial market opportunities.

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