MicroTech Systems, Inc. Engineering Wet Process Solutions

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Orca-S – Single Crystal Texturing

Alkaline Batch Process For 1500 WPH Single Crystal Silicon Wafer Solar Process Line

Process Steps

  • Saw damage removal (heated KOH)
  • Texturing (alkaline texturing with KOH/IPA)
  • DI rinse
  • Native oxide/metal removal (HF/HCL)
  • DI rinse
  • Drying (heated DI slow pull and air knife)

Key Features

  • High throughput with multiple robots, 1500 to 3000 wafers per hour
  • Automated staging with 6 cassette input and output
  • Low cost of ownership; extended bath life, reuse of rinsing water
  • Input and output scales for wafer thickness metrics plus supporting software
  • Minimal wafer breakage (>1 in 500)
  • Minimal downtime for bath replacement, (<1 hour bath change)
  • Monitoring bath metrics such as pH and temperature, plus concentration as an option
  • Process support provided, optimized texturing and PSG removal process
  • Safety is designed and built in; HF monitors, fire suppression, and SEMI safety compliant
  • Software is SECS /GEM compliant
  • System is SEMI S2 compliant

Process Control

  • Access control
  • Multiple levels of functional security.
  • Data logging
  • Detail data is logged in individual daily logs for operator tool interactions, all events, alarms, and warnings.
  • Lot tracking log files
  • Custom trace files.
  • Recipe control
  • Recipe maintenance
  • SECS-II GEM-compliant host interface.
  • Integrates in-factory network without the need for special software or hardware.
  • Communication has been an essential part of the product line since inception.
  • SECS protocol was implemented and used internally within the process control network.

ORCA-S Batch Process Line by MT Systems, Inc.
Fig. 1. Sample Layout Drawing of ORCA-S Batch Process Line for Single Crystal Saw Damage Removal, Texturization and Clean

Please also check out MicroTech(MT Systems)  solar cell photovoltaic manufacturing system and other services that we provide to solar industry.


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